Programmable micro-transfer-printing for heterogeneous material integration

نویسندگان

چکیده

Micro-transfer printing is an emerging assembly technique to deterministically transfer ink comprising micro-/nano-objects from a donor substrate receiver substrate. This has generated increasing interest over the last decade due its unique capability of integrating diverse heterogeneous materials into various structures and layouts. The growing number applications enabled by micro-transfer includes flexible electronics, sensors, photovoltaics, micro-LED displays. work presents approach, which relies on thermally induced adhesion modulation shape memory polymer materials. An individually addressable micro-fabricated resistive heater array used locally deliver heat for pixel actuation. Selectively transferring chips closely packed microchip (pitch: 100 µm, size: 50 × µm2) demonstrated. head can be dynamically configured assemble micro-objects in arbitrary patterns, allowing digital manufacturing, object sorting, or in-line correction defects. These capabilities, together with simple robust structure head, enable high process scalability flexibility material integration.

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ژورنال

عنوان ژورنال: AIP Advances

سال: 2022

ISSN: ['2158-3226']

DOI: https://doi.org/10.1063/5.0090890